|He earned PhD from Chinese Academy of Sciences in 1987, and post-doc in UC-Berkeley and UT Austin. More than 30 years industry experience in plasma application in semiconductor processes, including Novellus Systems, Intel Corp and SMIC. Along with 105 published papers, more than 100 granted and pending granted patents in semiconductor processes are to his credit. Some of research results have been cited in the published textbook in USA. Since 2001, he has joined and led the pre-study of technology development from 0.18um to 14nm technology nodes. Besides, he is a joined guest professor of Peking University and Fudan University. Since 2008, he has earned three awards of "the 2nd class award of National Science and Technology Progress". He was nominated to be "the top 10 outstanding scientists and engineers in China" in 2013. He was selected as Academician of Chinese Academy of Engineering in 2019. He is now the Dean of the School of Micro-nano-Electronics, Zhejiang University.|
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