Lithography process and key technical aspects in exposure tools, materials, and the future development roadmap

Welcome to CSTIC 2023, one of the largest and the most comprehensive annual semiconductor technology conferences in China and Asia since 2000. Organized by SEMI and IEEE, co-organized by Institute of Microelectronics, Chinese Academy of Sciences and SAMT. CSTIC 2023 has been held on June 26-27, 2023 in Shanghai, China. Virtual conference will be held from June 29 to July 26. The conference has nine symposiums covering all aspects of semiconductor technology with focus on manufacturing and advanced technology, including detailed manufacturing processes, device design, integration, materials, and equipment, as well as emerging semiconductor technologies, circuit design, and silicon material applications. Hot topics, such as artificial intelligence (AI) chips, 6G chips, neuromorphic computing technology, advanced memory technology, 3D integration, MEMS technology will also be addressed in the conference.
**Accepted papers will be submitted for inclusion into IEEE Xplore subject to meeting IEEE Xplore's scope and quality requirements.
Prof. Albert Fert
Research Director Unité Mixte de Physique , Nobel Laureate in 2007
Dr. Yang Pan
null Lam Research
Mr. Jinrong Zhao
Chairman of the Executive Committee, Beijing NAURA Technology Group Co., Ltd.
Dr. Yalin Xiong
Senior Vice President and General Manager, KLA Corporation
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